Introduction

The standard vacuum feedthrough consists of one permanent magnetic field,
two magnetic poles, one magnetic driving shaft and magnetic fluid,
the standard product is designed to withstand 2-atmospheric pressure and
thus it is absolutely safe as vacuum sealing.
Features of vacuum feedthrough
1.Sealing features: The magnetic fluid can fill the gaps of the entire rotary
shaft and can completely isolate air, water, moisture, oil vapor and other
contaminants. The leakage from the computer seal is undetectable even with
high-sensitive He mass spectrometric leakage detector.
2.Long service life: The magnetic fluid is low in activity and high in stability
and the vacuum feedthrough has service life above 10 years without need of
maintenance
3.Pollution-free: Since the sealing location involves no mechanical friction,
no particle will be formed to pollute the system.
4.Optimal torque transmission: The torque may be 100% transmitted and
the low-viscosity magnetic fluid and the contactless structure will ensure steady
and fast rotation.
Applications
Currently, the vacuum feedthrough is widely used in vacuum deposition and
manufacture of semi-conductor (such as single-crystal furnace, plasma etching
and chemical vapor-deposition) and liquid crystal.